Abstract：Abstract：This paper introduces the principle, usage and calibration of step gauge. Analyze the limitation of the contact calibrate for step gauge. Now, a new Automatic Aiming Technique for Non-contact Calibration for Step Gauge is described. Combining optoelectronic microscope, laser interferometer and two speed positioning system，non-contact calibration system for step gauge is developed．It can provide non-contact calibration for step gauge with high accuracy. This paper will play a positive role in promoting the development of the Calibration for Step Gauge.
2019, Vol. 29 